Premix vaporization unit for high temperature
- Premix vaporization technology (patent pending).
- Precise flow rate control and premixing of up to 4 precursors using LM-2100A liquid mass flow meters.
- Simultaneous vaporization in one vaporizer chamber.
- Space savings and lower cost of ownership.
- Atmospheric and vacuum process capabilities.
- Wide carrier gas flow range (800SCCM-130SLM).
- Maximum operating temperature of 300°C.
- Liquid supply and vaporize unit for the ferroelectrics film(PZT,BST,etc)
- Flow rate control and vaporization when used in combination with Liquid mass flow meter.