Prestige Technology (S) Pte Ltd


May 26, 2015adminUncategorizedComments Off on VU-450

Vaporization system for LPCVD and APCVD

  • Precise flow rate control and efficient vaporization of a wide variety of liquids when used in combination with the LM-2100A liquid mass flow meter (US PAT. 5372754).
  • Atmospheric vaporization and supply of pure water.
  • Wide range of carrier gas flow rates (1SLM-100SLM)
  • Maximum operating temperature of 200oC


  • Liquid supply and vaporize unit for H2O or etc.
  • Flow rate control and vaporization when used in combination with Liquid mass flow meter.
  • 7g/min(H2O)

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