Vaporization system for LPCVD and APCVD
- Precise flow rate control and efficient vaporization of a wide variety of liquids when used in combination with the LM-2100A liquid mass flow meter (US PAT. 5372754).
- Atmospheric vaporization and supply of pure water.
- Wide range of carrier gas flow rates (1SLM-100SLM)
- Maximum operating temperature of 200oC
- Liquid supply and vaporize unit for H2O or etc.
- Flow rate control and vaporization when used in combination with Liquid mass flow meter.