Vaporization system for LPCVD and APCVD
- Precise flow rate control and efficient vaporization of a wide variety of liquids when used in combination with the LM-2100A liquid mass flow meter (US PAT. 5372754).
- Applicable not only to vacuum but also atmospheric processes.
- Maximum operating temperature of 200oC.
- WCompact body size (compatible with VU-410/420).
- Wide range of carrier gas flow rates (50SCCM-4SLM).
- Liquid supply and vaporize unit for H2O or etc.
- Flow rate control and vaporization when used in combination with Liquid mass flow meter.
- 10g/min(TEOS equivalent)