Prestige Technology (S) Pte Ltd

VU-430A

May 26, 2015adminUncategorizedComments Off on VU-430A

Vaporization system for LPCVD and APCVD

VU-430
  • Precise flow rate control and efficient vaporization of a wide variety of liquids when used in combination with the LM-2100A liquid mass flow meter (US PAT. 5372754).
  • Applicable not only to vacuum but also atmospheric processes.
  • Maximum operating temperature of 200oC.
  • WCompact body size (compatible with VU-410/420).
  • Wide range of carrier gas flow rates (50SCCM-4SLM).
  • (50SCCM~4SLM)

Applications

  • Liquid supply and vaporize unit for H2O or etc.
  • Flow rate control and vaporization when used in combination with Liquid mass flow meter.
  • 10g/min(TEOS equivalent)

Comments are closed.