Prestige Technology (S) Pte Ltd


May 26, 2015adminUncategorizedComments Off on VU-206

Vaporization system for LPCVD and APCVD

  • Precise flow rate control and efficient vaporization of liquids (TEOS, TEB, TEPO, etc.) when used in combination with the LM-2102P, LM-2202P and LM-3102E liquid mass flow meters.
  • Applicable to vacuum process and atmospheric process.
  • Maximum operating temperature of 160°C.
  • Piezo control valve provides fast and precise control.
  • Compact body size.


  • For BPSG film
  • Flow rate control and vaporization when used in combination with Liquid mass flow meter.
  • 7g/min(TEOS equivalent)
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