Vaporization system for LPCVD and APCVD
- Precise flow rate control and efficient vaporization of liquids (TEOS, TEB, TEPO, etc.) when used in combination with the LM-2102P, LM-2202P and LM-3102E liquid mass flow meters.
- Applicable to vacuum process and atmospheric process.
- Maximum operating temperature of 160°C.
- Piezo control valve provides fast and precise control.
- Compact body size.
For BPSG film
Flow rate control and vaporization when used in combination with Liquid mass flow meter.