Semiconductor wafer process is facing its rapid progress as pitch narrows, large size wafers are deployed to the line, and new materials are started being used in mass production.
For efficient investment, Mini Environmental concept is becoming popular and SMIF POD is widely used in 8-inch fabs.
Its clean management is now a critical issue.
Hugle Electronics has been a dominant player in cleaning system for wafer cassette and box.
Through that experience and accumulated injstall base, it developed the industry-only fully automated SMIF POD clean system with Automatic door open-close function.
Many units of this system have been installed in mass production fabs.