In 300mm lines, cassette-box-one-unit FOUP is commonly used on automatic transfer system OHT or RGV and its comprehensive management is a vital issue for product efficiency.
- Super high purity by ultrasonic DIW Jet Wash
- Shell and door with automatic opening and opening and shutting mechanism.
- The operation is possible in both mode (online, offline)
- Quick dry by FOUP Door Spinning
- Result in 300mm mass production line (overseas)