Prestige Technology (S) Pte Ltd

Trace-Rite RPS

September 1, 2011adminForth-RiteComments Off on Trace-Rite RPS
  • Designed specifically for end point detection of PECVD/CVD remote plasma chamber clean processes.
  • Seamless tool integration for tools with or without integrated algorithmic capability.
  • Integrations available for 200-300mm AMAT or Novellus tools as well as AKT flat panel tools.
  • Normally for Remote Plasma Clean
Trace-Rite RPS

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