Prestige Technology (S) Pte Ltd

Trace-Rite Classic

September 1, 2011adminForth-RiteComments Off on Trace-Rite Classic
  • The Classic version.
  • Designed to provide real time RF based end point signals for plasma etch or deposition chamber clean in either silicon or flat panel manufacturing.
  • Integration with SENSE-RITE® provides highly process correlated measurement data for accurate detection.
  • Focused on manufacturing cost reduction and PFC emissions reductions. Normally used for Novellus tools C1 and C2. 8 inch tools and for insitu clean.
Trace-Rite Classic

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