MC-700 Series Mass Flow Controller
Equipped with 3 variable rotary switches for gas type selection and flow rate adjusmtents
Mass Flow Controller MC-700 Series has rotary switch and VR function-installed units offer one to multiple device support which eliminate the need for spare parts. Widely-used RS-485 interface equipped (Daisy-chain networks support up to 32 MFC connections). By using metal case and various filters, stable operation can be acheived through reduction of radio frequency noises and electromagnetic field interferences.
■ LINTEC's original ambient temperature-compensated sensor incorporated.
■ Highly functional upon installation of microprocessor.
■ Diaphragm valve with small dead volume.
■ High-speed and high efficiency piezoelectric actuator.
■ Long-term leak tightness ensured using metal seal.
|Material||Materials exposed to gas - SUS316L, PCTFE, PTFE, Seal materials - SUS316L|