Prestige Technology(S) Pte Ltd

MC-5000L Series

June 18, 2015adminGas Mass Flow ControllerComments Off

DeviceNetTM interface-dedicated mass flow controller in accordance with SEMI

MC-5000L Series
  • Widely-used sensor-actuator Networks DeviceNetTM(ODVA) interface
  • Top or side communication connectors installation available for selection
  • LINTEC’s original ambient temperature-compensated sensor incorporated
  • Highly functional upon installation of microprocessor
  • Diaphragm valve with small dead volume
  • High-speed and high performance piezoelectric actuator
  • Long-term leak tightness ensured using metal seal
  • By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences

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