Prestige Technology(S) Pte Ltd

MC-5000C Series

June 18, 2015adminGas Mass Flow ControllerComments Off

EtherCAT-dedicated mass flow controller

MC-5000C Series
  • EtherCAT digital interface in accordance with SEMI E54.20-1108
  • LINTEC’s own ambient temperature-compensated sensor incorporated
  • Highly functional upon installation of microprocessor
  • Diaphragm valve with small dead volume
  • High-speed and high efficiency piezoelectric actuator
  • Long-term leak tightness ensured using metal seal
  • By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises
    and electromagnetic field interferences

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