Prestige Technology(S) Pte Ltd

MC-3000S Series

June 18, 2015adminGas Mass Flow ControllerComments Off

MC-3000S Series: Mass flow controller equipped with LINTEC’s original low pressure differential device to operate
at low differential pressure environment

MC-3000S Series
  • Low pressure differential device
  • By using original low pressure differential device not only AsH3 and PH3 for ion implantation
    but also applying solid state material and liquefied gas without heating
  • RS-485 digital interface
  • LINTEC’s original ambient temperature-compensated sensor incorporated
  • Highly functional upon installation of microprocessor
  • Diaphragm valve with small dead volume
  • High-speed and high performance piezoelectric actuator
  • Long-term leak tightness ensured using metal seal
  • By using metal case and various filters, stable operation can be achieved through reduction of
    radio frequency noises and electromagnetic field interferences

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